Surfaces, Interfaces, and Films for Microelectronics / Edition 1

by Eugene A. Irene

Overview

The practical, accessible independent-study guide and text on surface science fundamentals and microelectronics processes, this reference explains key concepts and important analytical techniques. It discusses films and interfaces, electronic passivation of semiconductor-dielectric film interfaces, the Si-SiO2 interface, and other MOSFET interfaces, and includes figures, charts, exercises, and examples of applications. This is the ideal guide to help professionals in the electronics industry get up to speed fast. It is also an excellent text for upper-level graduate and undergraduate students.

Product Details

ISBN-13:	9780470174470
Publisher:	Wiley
Publication date:	02/08/2008
Pages:	536
Product dimensions:	6.40(w) x 9.50(h) x 1.25(d)

About the Author

Eugene A. Irene, PhD, is Professor of Chemistry at the University of North Carolina, Chapel Hill. Prior to that appointment, he worked in the Thomas J. Watson Research Center at IBM for ten years. Professor Irene has written more than 250 journal publications and is the author of various books, including Electronic Materials Science (Wiley). He is coeditor of Handbook of Ellipsometry and numerous scientific reviews and book chapters.

Table of Contents

Preface.

Part I: Fundamentals of Surfaces and Interfaces.

1. Introduction to Surfaces.

2. Structure of Surfaces.

3. Thermodynamics of Surfaces and Interfaces.

4. Surface Roughness.

5. Surface electronic States.

6. Other Surface Probes.

7. Charged Surfaces.

8.Adsorption.

9. Elliposometry and Optical Properties of Surfaces, Interfaces, and Films.

Part II: Microelectronics Applications.

10. Films and Interfaces.

11. Electronic Passivation of Semiconductor-Dielectric Film Interfaces.

12. The Si-SiO₂ Interface and Other MOSFET Interfaces.

Index.