Introduction to VLSI Process Engineering / Edition 1

by Y. Naka, K. Sugawara, C. McGreavy

Overview

Integrated circuits are finding ever wider applications through a range of industries. Introduction to VLSI Process Engineering presents the design principles for devices, describes the overall VLSI process, and deals with the essential manufacturing technologies and inspection procedures.

Product Details

ISBN-13:	9780412395505
Publisher:	Springer Netherlands
Publication date:	06/30/1993
Edition description:	1993
Pages:	210
Product dimensions:	6.10(w) x 9.25(h) x 0.02(d)
Age Range:	18 Years

Table of Contents

1 Coming age of VLSI.- 1.1 Functionality.- 1.2 Use in consumer products.- 1.3 Impact on industry.- 1.4 Future trends.- 2 Semiconductor market.- 2.1 Features of the semiconductor industry.- 2.2 Types and classification of semiconductors.- 2.3 Expanding semiconductor market.- 2.4 Trends in associated industries.- 2.5 Future prospects.- 3 Evolution of semiconductors.- 3.1 History of semiconductor technology.- 3.2 Future developments.- 4 Characteristics of VLSI.- 4.1 Device structures.- 4.2 Memory types.- 4.3 Arrangement of VLSI devices.- 4.4 New devices.- 5 VLSI process engineering operations.- 5.1 Aspects of production.- 5.2 Basic processing technology.- 6 Packaging and process monitoring technology.- 6.1 Packaging.- 6.2 Process monitoring techniques.- 7 Production of silicon wafers and environmental problems.- 7.1 Silicon wafers.- 7.2 Chemicals used in VLSI processing.- 7.3 Environmental considerations.- 8 Process engineering aspects of VLSI production.- 8.1 Basic issues in processing.-8.2 Opportunities for innovation.- Appendix A Glossary.- Appendix B List of abbreviations.- References.

Editorial Reviews

...an extremely good text... - Microelectronics Journal

From the Publisher