Handbook of Contamination Control in Microelectronics: Principles, Applications and Technology

by Donald L. Tolliver

Overview

This book introduces contamination control in a comprehensive manner. It covers the basics for the beginner, and delves in depth into the more critical issues of process engineering and circuit manufacturing for the more advanced reader. The reader will begin to see how the puzzle of contamination control comes together and to focus on the fundamentals required for excellence in modern semiconductor manufacturing.

What makes the area of contamination control unique is its ubiquitous nature, across all facets of semiconductor manufacturing. Clean room technology, well recognized as a fundamental requirement in modern day circuit manufacturing, barely scratches the surface in total contamination control. This handbook defines and describes most of the major categories in current contamination control technology.

Product Details

ISBN-13:	9780815511519
Publisher:	Elsevier Science
Publication date:	12/31/1988
Series:	Materials Science and Process Technology Series
Edition description:	New Edition
Pages:	509
Product dimensions:	6.00(w) x 9.00(h) x (d)

Table of Contents

Aerosol Filtration Technology
Instrumentation for Aerosol Measurement
Clean Room Garments and Fabrics
Guidelines for Clean Room Management and Discipline
Electrostatics in Clean Rooms
Ultra High Purity Water-New Frontiers
Deionized (DI) Water Filtration Technology
Monitoring System for Semiconductor Fluids
Particles in Ultrapure Process Gases
Contamination Control and Concerns in VLSI Lithography
Contamination Control in Electronic Chemicals
Surface Particle Detection Technology
Particle Contamination by Process Equipment
Wafer Automation and Transfer System
Conclusion
References
Glossary
Index

What People are Saying About This

From the Publisher

This book introduces contamination control in a comprehensive manner. It covers the basics for the beginner, and delves in depth into the more critical issues of process engineering and circuit manufacturing for the more advanced reader.

Editorial Reviews

"àshould be in the library of all microelectronics engineers and designers." —Microelectronics & Reliability

From the Publisher

Introduces contamination control, covering the basics in moist areas for the beginner, going deeper into the more critical issues of process engineering and circuit manufacturing for the more advanced reader. Defines and describes most of the major categories in current contamination control technology. Annotation c. Book News, Inc., Portland, OR (booknews.com)

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