Confocal Scanning Optical Microscopy and Related Imaging Systems / Edition 1

by Gordon S. Kino, Timothy R. Corle

Overview

This book provides a comprehensive introduction to the field of scanning optical microscopy for scientists and engineers. The book concentrates mainly on two instruments: the Confocal Scanning Optical Microscope (CSOM), and the Optical Interference Microscope (OIM). A comprehensive discussion of the theory and design of the Near-Field Scanning Optical Microscope (NSOM) is also given.

The text discusses the practical aspects of building a confocal scanning optical microscope or optical interference microscope, and the applications of these microscopes to phase imaging, biological imaging, and semiconductor inspection and metrology.A comprehensive theoretical discussion of the depth and transverse resolution is given with emphasis placed on the practical results of the theoretical calculations and how these can be used to help understand the operation of these microscopes.

Product Details

ISBN-13:	9780124087507
Publisher:	Elsevier Science
Publication date:	08/29/1996
Pages:	335
Product dimensions:	6.00(w) x 9.00(h) x (d)

Table of Contents

InstrumentsDepth and Transverse ResolutionPhase ImagingApplicationsAppendix A: Vector Field Theory for Depth and Transverse Resolution of a CSOM

Editorial Reviews

Introduces scientists and engineers to the field of scanning optical miscroscopy in order to overcome the problems associated with submicrometer imaging of complex 3D structures. Concentrates mainly on the confocal scanning optical microscope (CSOM), and the optical interference microscope (OIM), although it does discuss the theory and design of the near-field scanning optical microscope (NSOM). Covers practical aspects of building a CSOM or OIM, and considers the applications of these instruments to phase and biological imaging, semiconductor inspection, and metrology. Also contains a theoretical discussion of the depth and transverse resolution, emphasizing practical results of the theoretical calculations, and their uses in understanding the operation of the microscopes. Annotation c. by Book News, Inc., Portland, Or.

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