Silicon-on-Insulator Technology: Materials to VLSI / Edition 1

by J.-P. Colinge

Overview

Silicon-on-Insulator Technology: Materials to VLSI, 2nd Edition describes the different facets of SOI technology. SOI chips are now commercially available and SOI wafer manufacturers have gone public. SOI has finally made it out of the academic world and is now a big concern for every major semiconductor company. SOI technology has indeed deserved serious recognition: high-temperature (400°C), extremely rad-hard (500 Mrad(Si)), high-density (16 Mb, 0.9-volt DRAM), high-speed (several GHz) and low-voltage (0.5 V) SOI circuits have been demonstrated. Strategic choices in favor of the use of SOI for low-voltage, low-power portable systems have been made by several major semiconductor manufacturers.

Product Details

ISBN-13:	9780792391500
Publisher:	Springer US
Publication date:	03/31/1991
Series:	The Springer International Series in Engineering and Computer Science , #132
Edition description:	1991
Pages:	228
Product dimensions:	6.14(w) x 9.21(h) x 0.24(d)

Table of Contents

Preface

Chapter 1: Introduction.....1

Chapter 2: SOI Materials.....7

Chapter 3: SOI Materials Characterization.....67

Chapter 4: SOI CMOS Technology.....105

Chapter 5: The SOI MOSFET.....123

Chapter 6: Other SOI Devices.....193

Chapter 7: The SOI MOSFET Operating in a Harsh Environment.....223

Chapter 8: SOI Circuits.....241

Index.....269

Editorial Reviews

Following an introduction which briefly describes some advantages of SOI technology, such as the absence of latchup in CMOS structures and the reduction of parasitic source and drain capacitances, chapters cover the different approaches for producing SOI materials (and issues of material quality); characterization techniques; the basics of SOI CMOS processing; the physics of the SOI MOSFET; other types of devices fabricated on SOI substrates; the performances of SOI devices operating in a harsh environment (high temperature or radiations); and the performance of modern SOI circuits, such as low-voltage, low-power CMOS, rad-hard, high-temperature, RAM and smart-power circuits. Annotation c. by Book News, Inc., Portland, Or.

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