Multi-Wafer Rotating MEMS Machines: Turbines, Generators, and Engines / Edition 1

by Jeffrey Lang

Overview

The collaboration and research that was developed to produce the MIT Gas Turbine Engine are described in this book. Both the engine and generator are fabricated from silicon using a combination of bulk and surface microfabrication technologies. The book discusses the technical details that have gone into producing the engine and the overall systems-level tradeoffs, in particular its motor compressors and turbine generators, and the decisions that have been made.

Product Details

ISBN-13:	9780387777467
Publisher:	Springer US
Publication date:	09/30/2009
Series:	MEMS Reference Shelf
Edition description:	2010
Pages:	456
Product dimensions:	6.40(w) x 9.30(h) x 1.30(d)

Table of Contents

to PowerMEMS.- System Design Considerations and Device Overview.- Materials, Structures and Packaging.- Microengine Fabrication.- Fabrication of Microscale Rotating Magnetic Machines.- High-Speed Gas Bearings for Micro-Turbomachinery.- Thermofluidics and Turbomachinery.- Motors and Generators.- Microcombustors for Rotating Machinery.