Electrochemical Micromachining for Nanofabrication, MEMS and Nanotechnology

by Bijoy Bhattacharyya

Overview

Electrochemical Micromachining for Nanofabrication, MEMS and Nanotechnology is the first book solely dedicated to electrochemical micromachining (EMM). It begins with fundamentals, techniques, processes, and conditions, continuing with in-depth discussions of mechanisms of material removal, including an empirical model on the material removal rate for EMM (supported by experimental validation). The book moves next to construction-related features of EMM setup suitable for industrial micromachining applications, varying types of EMM, and the latest developments in the improvement of EMM setup. Further, it covers power supply, roll of electrolyte, and other major factors influencing EMM processes, and reports research findings concerning the improvement of machining accuracy and efficiency. Finally, the book devotes a chapter to the design and development of micro-tools, one of the most vital components in EMM.

Product Details

ISBN-13:	9780323327374
Publisher:	Elsevier Science
Publication date:	04/17/2015
Series:	Micro and Nano Technologies
Pages:	296
Product dimensions:	7.50(w) x 9.25(h) x (d)

About the Author

Professor, Production Engineering Department, Jadavpur University, Kolkata, India

Field of Specialization: Non-Traditional Machining Processes, Micro Machining.

Advanced Manufacturing Technology (AMT), Production Management.

Principal Investigator since 1995 for seven multi-year research projects e.g. on Electrochemical Machining (ECM), Electrochemical Discharge Machining (ECDM), and Electrochemical Micromachining (EMM)

Professor, Production Engineering Department, since 2000

Head of the Department, Production Engineering Department, from 2001 to 2003

Coordinator of Quality Improvement Program (QIP), Jadavpur University, since 2002

Coordinator of Center of Advanced Study (CAS) Phase II-IV Programs consisting thrust areas: Micromachining and Nanotechnology, Micromanufacturing, sponsored by UGC, since 2003

Achieved several Certificates of Merit and Certificates of Achievement Institution Award & Gold Medal by The Institution of Engineers (India) for a research paper Keynote speaker, chair person, presenter and organizer/coordinator of several international conferences.

Visited several countries such as England, Dublin, Taiwan, Hongkong, Thailand etc. for research and academic purposes.

Board member and Fellow of several academic bodies in several institutions

Guest editor of International journals and editor of conference proceedings

Supervised several Ph.D thesis and filed several patents in his credit.

Authored and co-authored around 353+ articles

Author of 83 articles with 1352 total citations by 959 documents as listed in Scopus

H-Index of 24 per SCOPUS

Table of Contents

1. Introduction2. Electrochemical Machining: Macro to Micro3. Principle of Material Removal in EMM4. Types of EMM5. Electrochemical Micromachining (EMM) Setup6. Design and Development of Micro Tools7. Influencing Factors of EMM8. Improvement of Machining Accuracy9. Advantages, Applications and Limitations of EMM 10. Micro-Features Fabrication for MEMS and Other Microengineering Applications11. Electrochemical Micro System Technology (EMST)12. Recent Advancements in EMM for Nanofabrication13. Nano-Features on Metals and Semiconductors for Nanotechnology Applications

What People are Saying About This

From the Publisher

Written by a world-renowned expert, this first book solely dedicated to electrochemical micromachining (EMM) focuses on applications in the semiconductor industry and on future directions of increasingly important EMM technology

Editorial Reviews

"This book is an excellent addition to the nanotechnology literature…The book will be very useful to professionals as well as nonprofessionals who are interested in electrochemical micromachining. I strongly recommend this book for scientists, engineers, and those who wish to teach this subject." —MRS Bulletin

From the Publisher